Characterization and Metrology for Nanoelectronics
2007 International Conference on Frontiers of Characterization and Metrology
Von:Seiler, David G.; Diebold, Alain C.; McDona; Seiler, David G.; Diebold, Alain C.; McDonald, Robert; Garner, C. Michael; Herr, Dan; Khosla, Rajinder P.; Secula, Erik M.
ISBN: 9780735404410
ISBN-10: 0735404410
Artikelnummer: 132970
Lieferantenbestellnummer: 8398640
Springer-Verlag GmbH,Ln ,2007 ,578 Seiten
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This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.
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